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Prof. Dr. Maria Kufner

Lehrveranstaltungen

  • Grundlagen der Mathematik
  • Ingenieurmathematik
  • Simulationstechnik
  • Simulationspraktikum

Fakultät Angewandte Naturwissenschaften und Wirtschaftsingenieurwesen

Campus Cham

Professorin

1.11

09971/99673-45

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Beitrag (Sammelband oder Tagungsband)

  • Daniel Schäffer
  • Daniel Klenkert
  • Julian Stauch
  • Alois Kasberger
  • Stephan Kufner
  • Maria Kufner
  • Raimund Förg

Planar ion exchange and laser ablation for prototyping of integrated optics in glass

pg. 23.

  • (2021)

DOI: 10.1117/12.2596883

Abstract anzeigen

A new process for prototype manufacturing of integrated optical components was investigated. Sodium ions near the surface of a glass wafer are exchanged with silver ions, which creates a layer of increased refractive index. Subsequently, parts of the glass surface are ablated using a femtosecond laser. The resulting ridges determine the final optical waveguide structure. However, manufacturing-related roughness leads to high optical losses. To reduce these losses and to optimize the index profile, a second ion exchange with sodium ions is performed. These ions are introduced into the glass from all three ridge surfaces, causing the silver ions to migrate towards the ridge center. This results in a gradient index waveguide. We created a numerical model, to simulate the ion exchanges. Experiments were conducted, to determine the parameters for the ion exchange and the laser ablation. Based on the results, a process window was defined for each step, thus enabling the manufacturing of integrated optical components.
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Zeitschriftenartikel

  • Daniel Schaeffer
  • Daniel Klenkert
  • Julian Stauch
  • F. Brand
  • W. Foss
  • J. Schwietering
  • P. Wachholz
  • Maria Kufner

Simulation of field-assisted ion exchange in glass regarding the space-charge density and pseudo-mixed-alkali effect

In: Applied Optics (Optical Technology Division) vol. 60 pg. 6632.

  • (2021)

DOI: 10.1364/AO.427171

Abstract anzeigen

A model is proposed to describe the field-assisted molten salt ion exchange of Na+ with Ag+ in glass. It accounts for the buildup of space-charge zones and for the pseudo-mixed-alkali effect. Simulations in 1D proved to be consistent with experimental results. The 1D model has been expanded to 2D, making it suitable for simulating the fabrication of channel waveguides. Using a first-order approximation, a good agreement between the simulations and the experimental data can be achieved.
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Patent

  • Maria Kufner
  • F. Brand
  • V. Fairuschin
  • D. Schäffer

Abstandssensor

  • 11.08.2018 (2018)
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Patent

  • Maria Kufner
  • F. Brand
  • V. Fairuschin
  • D. Schäffer

Distance sensor

  • (2018)

Abstract anzeigen

The invention relates to a distance sensor (16, 18) of a motor vehicle, in particular for collision monitoring of an electromotive door adjustment (2), with a lighting device (28) for emitting light (36) having an emission angle range (50), and with a detection device (30) for receiving the emitted light (36) having a detection angle range (54). The distance sensor (16, 18) further comprises an optical element (32) for guiding the emitted light (36), the optical element (32) having a first input angular range (46) and a reduced second input angular range (48) between which a Number of optical fibers (44) is arranged. The invention further relates to an electromotive door adjustment (2) of a motor vehicle.
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Beitrag (Sammelband oder Tagungsband)

  • F. Brand
  • D. Schäffer
  • W. Foß
  • Maria Kufner

Simulation zur Herstellung von planar integrierten Multimode-Wellenleitern in Glas

vol. urn:nbn:de:0287-2018-P037

  • (2018)
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Beitrag (Sammelband oder Tagungsband)

  • D. Schäffer
  • F. Brand
  • W. Foß
  • Maria Kufner

Herstellung von planar integrierten Multimode-Wellenleitern in Glas für asymmetrische Verzweiger

vol. urn:nbn:de:0287-2018-A035

  • (2018)

Abstract anzeigen

Optische Kommunikation über Multimode-Wellenleiter findet vermehrt Einsatz im Bereich der Datacom-Netze. Besonderes Interesse gilt unter anderem Verzweigern mit asymmetrischer Leistungsaufteilung zum Monitoring des Datenverkehrs. Eine vielversprechende Technologie, diese Komponenten mit den dafür erforderlichen Eigenschaften herzustellen, ist der Natrium-Silber-Ionenaustausch in Glas. Gängige Methoden für Design und Herstellung von Singlemode-Verzweigern sind auf Multimode-Verzweiger mit hoher Asymmetrie nicht unmittelbar übertragbar. Die Herstellung von planar integrierten Multimode-Lichtwellenleitern durch die Kombination von Fotolithographie und feldunterstütztem Ionenaustausch wird näher beleuchtet. Hier wird insbesondere zwischen Nass- und Trockendiffusionsprozessen unterschieden. Erste experimentelle Ergebnisse werden zusammen mit der zugehörigen Messmethodik zur Bestimmung der Brechzahlprofile vorgestellt. Diese zeigen neben der Ausprägung der Brechzahlunterschiede auch die Interaktion zwischen eng angeordnete Wellenleiter beim Herstellungsprozess auf.
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Zeitschriftenartikel

  • F. Singer
  • Maria Kufner

Model based laser-ultrasound determination of hardness gradients of gas-carburized steel

In: NDT & E International vol. 88 pg. 24-32.

  • (2017)

DOI: 10.1016/j.ndteint.2017.02.006

Abstract anzeigen

Gas carburizing is a common industrial process utilized for case hardening of low carbon steels. However, thereis a lack of non-destructive evaluation systems for the measurement of hardness-depth profiles. We propose anovel measurement method for the determination of hardness-depth profiles of two-step gas carburized steelspecimens. The method is based on the measurement of broadband laser excited Rayleigh waves. Rayleighwaves were generated by a pulsed Nd: YAG laser in the thermoelastic regime and measured with a heterodyneMach-Zehnder interferometer in the near-field. From two measurements with different source to receiverdistances the dispersion diagrams were calculated by means of the phase spectral analysis method. In order tosimulate the observed dispersive behavior of the Rayleigh waves,first the two-step gas carburizing process wassimulated using solutions of the diffusion equation. The resulting continuous hardness profile was thendiscretized into up to 100 layers. Thereafter the Rayleigh wave dispersion diagram was calculated from thediscretized stack of layers using a delta-matrix formulation of the Thomson-Haskell transfer matrix method. Inorder to obtain bestfitting hardness profiles, the simulated dispersion diagrams werefitted to measurementswith a curvefitting algorithm. Comparison of the Rayleigh wave inversion method with destructively obtainedVickers hardness profiles shows good quantitative agreement.
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Zeitschriftenartikel

  • K. Drese
  • Maria Kufner
  • G. Lindner

Messen mit seismischem Spürsinn

In: Jahresmagazin Mess- und Sensortechnik pg. S. 70–76.

  • (2016)
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Beitrag (Sammelband oder Tagungsband)

  • F. Brand
  • F. Singer
  • M. Gerbeth
  • Maria Kufner

Vergleich zwischen Laser-Doppler- und photorefraktivem Interferometer zur Messung von akustischen Oberflächenwellen unter industriellen Bedingungen

vol. 18 pg. 425-430.

  • (2016)

DOI: 10.5162/sensoren2016/6.1.3

Abstract anzeigen

Laserbasierte-Ultraschall Verfahren werden unter Laborbedingungen bereits häufig verwendet, um Werkstoffeigenschaften zu ermitteln. Falls die zu vermessenden Proben jedoch eine diffuse Reflexion des Messlaserstrahls verursachen, treten häufig Probleme bei der Anwendbarkeit der laserbasierten Detektion auf. Ein zusätzliches Problem für die Anwendbarkeit von laserbasierten Ultraschall-Verfahren im industriellen Umfeld stellen niederfrequente Umgebungsschwingungen dar. Ein Interferometer mit photorefraktivem Kristall verspricht selbst bei einer Reflexion mit Speckle-Muster und Störschwingungen noch gute Signal-zu-Rausch-Verhältnisse. Ein Laser-Doppler-Vibrometer besitzt dagegen unter Laborbedingungen theoretisch eine niedrigere Detektionsgrenze, sofern eine gut reflektierende Probe sowie ausreichende Isolation von Störschwingungen vorhanden sind. Im Rahmen dieser Arbeit wird ein selbst entwickeltes Interferometer mit photorefraktivem Kristall mit einem Laser-Doppler-Vibrometer verglichen. Als Probe dient eine geschliffene Stahlprobe, die für die optische Messung nicht speziell behandelt wurde.
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Patent

  • S. Kufner
  • Maria Kufner
  • A. Radev
  • B. Roß
  • W. Foß

Sensor unit

  • 16.06.2016 (2016)
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Zeitschriftenartikel

  • J. Landskron
  • K. Schmidt
  • Maria Kufner
  • G. Lindner

Stable vortex generation in liquid filled wells by mode conversion of surface acoustic waves

In: Physics Procedia vol. 70 pg. 98-101.

  • (2015)

DOI: 10.1016/j.phpro.2015.08.051

Abstract anzeigen

The formation of stable vortex flow pattern has been observed at liquid filled aluminum wells of 15 to 30 mm diameter when Lamb waves are excited on the bottom of the wells by piezoelectric transducers operated at a frequency of 1 MHz. The shape of the vortex pattern changed with the position of the transducer. Strong differences in mixing times were observed between water and ethanol when the filling level was changed and a remarkable reduction of mixing time was achieved by the addition of a small amount of detergent to water at small filling levels. Besides mixing of liquids thermal equilibration within a liquid volume was accelerated by acoustic streaming.
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Patent

  • Maria Kufner

Fan-out-Element für Mehrkernfasern

  • (2014)
  • TC Teisnach Sensorik
  • Angewandte Naturwissenschaften und Wirtschaftsingenieurwesen
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Patent

  • Maria Kufner

Kombinierter Strom- und Spannungssensor

  • (2014)
  • Angewandte Naturwissenschaften und Wirtschaftsingenieurwesen
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Patent

  • L. Ross
  • S. Kufner
  • Maria Kufner
  • W. Foß
  • M. Bock
  • F. Baetz

Method for producing an optical splitter cascade and optical assembly

  • 20.09.2012 (2012)

Abstract anzeigen

An optical assembly, which is in particular in the form of a splitter component with a so-called splitter forming a passive optical component, is produced particularly inexpensively. In a first step a plurality of splitters are produced on a common wafer by forming a corresponding conductor track pattern. In a second step optical fibers are coupled simultaneously to the connection sides of the individual splitters with the aid of a connection carrier. Then, in a third step the individual splitters with the connection carriers connected thereto are separated form one another. Only one common coupling operation for a large number of splitters is required. The splitters may then be connected to form a splitter cascade.
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Patent

  • Maria Kufner

Optical Assembly

  • (2011)
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Patent

  • H.-J. Guttmann
  • Maria Kufner
  • S. Kufner
  • L. Ross
  • A. Weinert

Passive optical component for use as combiner in optical plug connection system for connection of light wave spacer in high speed fiber lasers, has support substrate halves connected with guide halves such the guide halves form wave guides

  • 14.07.2011 (2011)

Abstract anzeigen

The optical component (2), in particular a passive component (2) with an optical waveguide pattern (18) integrated in a carrier substrate (4), is designed in particular as a combiner for a high-power fiber laser. The device (2) has two preferably identical planar carrier substrate halves (4A, 4B) with integrated waveguide halves (6A, 6B) formed by field-enhanced ion diffusion. The two carrier substrate halves (4A, 4B) are bonded together without the use of a polymeric adhesive such that the respective waveguide halves (6A, 6B) form a waveguide (6). As a result, a higher design possibility in the formation of the waveguide pattern (18) is possible in comparison to conventional fusible couplers and it can be coupled to a variety of common types of optical fiber, including those that can not be used in fused couplers.
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Zeitschriftenartikel

  • Maria Kufner
  • S. Kufner

Ion exchange technology for optical waveguides

In: Optik & Photonik (Optical Components) pg. 32-34.

  • (2011)

DOI: 10.1002/opph.201190385

Abstract anzeigen

The term ‘integrated optics’ has been created more than 30 years ago and describes a family of technologies where light guiding structures are inte-grated on planar substrates. The concept corresponds to electronic integration, where lithographical tools are used to create structures in the micron range with submicron precision. One of the first reliable production processes for in-tegrated optical waveguides was ion ex-change in glass.
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner
  • S. Voigt

A refractive free space micro-optical 4x4 interconnect with aspherical lenses and fan-out

  • (2002)
  • Angewandte Naturwissenschaften und Wirtschaftsingenieurwesen
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Zeitschriftenartikel

  • S. Voigt
  • S. Kufner
  • Maria Kufner
  • I. Frese

A refractive free space micro-optical 4x4 interconnect on chip-level with optical fan-out fabricated by the LIGA-technique

In: IEEE Photonics Technology Letters

  • (2002)
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Buch (Monographie)

  • Maria Kufner
  • S. Kufner

LIGA und seine Anwendungen

Carl Hanser Verlag München

  • (2001)
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Zeitschriftenartikel

  • L. Singleton
  • Maria Kufner
  • S. Megtert

Considerations for the Deep X-ray Lithography with the SU-8 Resist

In: Journal of Photopolymer Science and Technology vol. 14 pg. 649-656.

  • (2001)

DOI: 10.2494/photopolymer.14.649

Abstract anzeigen

It is shown, that deep X-ray exposures of the SU-8 resist can achieve high resolution with substantially reduced exposure times. Irradiation at the synchrotron source of DCI at Lure (Paris) demonstrated a reduced exposure time for a 600μm thick SU-8, where the dose needed to obtain standing structures was 30J/cm3. Critical dimension measurements (CD) of the 600μm SU-8 resist structure have been obtained for the entire height of the structure and X-ray doses of 30J/cm3 achieved a CD gain per edge of +0.5μm, while doses of 40J/cm3 yielded a CD gain per edge of 0.9μm. However, the gain in the CD per edge is critically dependent on the solvent content in the resist. Doses of 40J/cm3 into a resist with a 2-4% residual solvent content yielded CD gains per edge of 0.3μm. Moreover, the variation in the CD per edge is less than 0.1μm along the entire height of the structure.
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Zeitschriftenartikel

  • I. Frese
  • S. Kufner
  • Maria Kufner

Novel optical backplane for automotive applications

In: IEEE Transactions C

  • (2001)
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Zeitschriftenartikel

  • S. Kufner
  • I. Frese
  • Maria Kufner

Optisches Backplane-Konzept auf der Basis von Wellenleiteroptik kombiniert mit Freiraumoptik

In: wt Werkstatttechnik online vol. 91

  • (2001)
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Beitrag (Sammelband oder Tagungsband)

  • S. Kufner
  • Maria Kufner
  • I. Frese
  • W. Ehrfeld

Novel Optical Backplane for Automotive Applications

In: Proceedings of the 9th IFAC Symposium on Control in Transportation Systems 2000. null (IFAC Proceedings Volumes) pg. 55-57.

  • (2000)

Abstract anzeigen

Deep etch lithography like the LIGA technique combines high precision and mass production capability. It is a well suited candidate for precIsion micro-optics because of its unique characteristic which allows the fabrication of optical and mechanical micro-elements in the same substrate. In this paper we will focus on a novel alignment tolerant optical backplane approach well suited for automotive applications that is based on a hybrid integration of guided wave and freespace micro-optics by the LIGA technique.
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Beitrag (Sammelband oder Tagungsband)

  • I. Frese
  • S. Kufner
  • Maria Kufner
  • T. Paatzsch
  • H.-D. Bauer
  • W. Ehrfeld

Combination of guided wave and free space micro-optics for a new optical backplane concept

  • (2000)
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Beitrag (Sammelband oder Tagungsband)

  • S. Kufner
  • Maria Kufner
  • I. Frese
  • T. Paatzsch
  • H.-D. Bauer
  • W. Ehrfeld

Micro-Optics for Optical Interconnects in Automotive Applications

In: Advanced Microsystems for Automotive Applications 2000. null (VDI-Buch) pg. 297-302.

Berlin, Heidelberg

  • (2000)
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Zeitschriftenartikel

  • V. Baukens
  • G. Verschaffelt
  • P. Tuteleers
  • P. Vynck
  • H. Ottevaere
  • Maria Kufner
  • S. Kufner
  • I. Veretennicoff
  • R. Bockstaele
  • A. Van Hove
  • B. Dhoedt
  • R. Baets
  • H. Thienpont

Performance simulations of multi-chip-module interconnects: Comparing guided-wave and free-space pathways

In: Journal of the European Optical Society (JEOS) - Special Issue on Optics in Computing vol. 1 pg. 255-261.

  • (1999)
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Beitrag (Sammelband oder Tagungsband)

  • H. Ottevaere
  • V. Baukens
  • P. Vynck
  • P. Tuteleers
  • B. Volckaerts
  • G. Verschaffelt
  • C. Debaes
  • K. Helderweirt
  • B. Vercouter
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • I. Veretennicoff
  • H. Thienpont

Refractive Microlens Arrays made by Deep Proton Lithgraphy: technology and characterisation

  • (1999)
  • Angewandte Naturwissenschaften und Wirtschaftsingenieurwesen
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Beitrag (Sammelband oder Tagungsband)

  • P. Tuteleers
  • P. Vynck
  • H. Ottevaere
  • V. Baukens
  • G. Verschaffelt
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • I. Veretennicoff
  • H. Thienpont

Deep Proton Lithographic CAD-CAM for the fabrication of Monolithic Micro-optical Elements

pg. 17-18.

  • (1999)

Abstract anzeigen

The technology of deep proton lithography in PMMA (poly methyl methacrylate) is a fabrication method for monolithic integrated refractive micro-optical elements and micro-mechanical holder structures, which allows structural depths in the order of several hundred microns. Different optical functions can be fabricated in one block and form monolithic integrated optical systems. In addition mechanical support structures and alignment features can be integrated with these optical systems. This paper will focus on the technological requirements of the irradiation, the development and diffusion procedures, and of the computer aided design-computer aided manufacturing (CAD-CAM) approach, which are necessary to achieve reproducible micro-optical components.
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Beitrag (Sammelband oder Tagungsband)

  • J. Schulze
  • W. Ehrfeld
  • J. Hoßfeld
  • M. Klaus
  • Maria Kufner
  • S. Kufner
  • H. Müller
  • A. Picard

Parallel optical interconnetion using self adjusting microlenses on injection moulded ferrules made by LIGA technique

  • (1999)
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Zeitschriftenartikel

  • V. Baukens
  • G. Verschaffelt
  • P. Tuteleers
  • P. Vynck
  • H. Ottevaere
  • Maria Kufner
  • S. Kufner
  • I. Veretennicoff
  • R. Bockstaele
  • A. Van Hove
  • B. Dhoedt
  • R. Baets
  • H. Thienpont

Performances of optical multi-chip-module interconnects: comparing guided-Wave and free-space pathways

In: Journal of Optics A: Pure and Applied Optics vol. 1 pg. 255-261.

  • (1999)

DOI: 10.1088/1464-4258/1/2/027

Abstract anzeigen

We simulate and compare optical transmission efficiencies, throughputs and interconnection lengths of free-space and POF-based guided-wave multi-chip-module optical interconnection demonstrators for different types of microcavity emitters.
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner

Refraktive Mikrooptik für optische Intrachip Verbindungen

  • (1999)
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Beitrag (Sammelband oder Tagungsband)

  • H. Ottevaere
  • V. Baukens
  • P. Vynck
  • P. Tuteleers
  • K. Helderweirt
  • B. Vercouter
  • B. Volckaerts
  • G. Verschaffelt
  • C. Debaes
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • I. Veretennicoff
  • H. Thienpont

Arrays of Spherical Microlenses Fabricated with Deep Proton Lithography

pg. 185-188.

  • (1998)
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Beitrag (Sammelband oder Tagungsband)

  • H. Ottevaere
  • P. Vynck
  • P. Tuteleers
  • V. Baukens
  • G. Verschaffelt
  • S. Kufner
  • Maria Kufner
  • H. Hermanne
  • H. Thienpont
  • I. Veretennicoff

Spherical Microlenses Fabricated with Deep Proton Lithography

pg. 8.

  • (1998)
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Beitrag (Sammelband oder Tagungsband)

  • F. Berghmans
  • M. Decreton
  • H. Thienpont
  • T. Nasilowski
  • K. Zdrodowski
  • K. Radomski
  • A. Bekiesza
  • Y. Carnicer
  • S. Kufner
  • Maria Kufner
  • I. Veretennicoff

Demonstration of a compact polarisation based two-dimensional multimode optical fibre space switch as optical fibre sensor multiplexer

pg. 241.

Piscataway, NJ, USA

  • (1998)

DOI: 10.1109/CLEOE.1998.719329

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Beitrag (Sammelband oder Tagungsband)

  • V. Baukens
  • G. Verschaffelt
  • P. Tuteleers
  • P. Vynck
  • H. Ottevaere
  • Maria Kufner
  • S. Kufner
  • H. Thienpont
  • I. Veretennicoff
  • R. Bockstaele
  • B. Dhoedt
  • R. Baets

Guided-wave versus free-space pathways for optical intra-multi-chip-module interconnects: Performance simulations and design rules

In: Proceedings of the 1998 International Optical Design Conference. null (OSA Technical Digest Series) pg. 833-847.

Washington, D. C.

  • (1998)
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Zeitschriftenartikel

  • G. Verschaffelt
  • R. Buczynski
  • P. Tutleers
  • P. Vynck
  • V. Baukens
  • H. Ottevaere
  • C. Debaes
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • J. Genoe
  • D. Coppée
  • R. Vounckx
  • S. Borghs
  • I. Veretennicoff
  • H. Thienpont

Demonstration of a Monolithic Multichannel Module for Multi-Gb/s Intra- MCM Optical Interconnects

In: IEEE Photonics Technology Letters vol. 10 pg. 1629-1631.

  • (1998)

DOI: 10.1109/68.726772

Abstract anzeigen

In this letter, we report on the demonstration of a 2.48-Gb/s multichannel optical data-link for intramultichip module interconnects. The optical module was fabricated in polymethylmethacrylate (PMMA) by deep proton lithography and monolithically integrates micromirrors and cylindrical lenses. With the same technology, we have also fabricated a single-channel optical bridge and used this component to demonstrate a proof-of-principle optical intrachip interconnect by establishing a digital data-link between optoelectronic transceivers integrated on the same chip.
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Beitrag (Sammelband oder Tagungsband)

  • G. Verschaffelt
  • C. Debaes
  • H. Ottevaere
  • P. Tuteleers
  • P. Vynck
  • V. Baukens
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • I. Veretennicoff
  • H. Thienpont

Demonstration of a 16-channel micro-optical interconnection module for free-space intra-MCM data communication

pg. 213-216.

  • (1998)
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Zeitschriftenartikel

  • F. Berghmans
  • T. Nasilowski
  • K. Zdrodowski
  • K. Radomski
  • A. Bekiesza
  • Y. Carnicer
  • S. Kufner
  • Maria Kufner
  • M. Decreton
  • I. Veretennicoff
  • H. Thienpont

A Cascadable Polarization-Based 1 to 9 Multimode Optical Fiber Switch using a PMMA Fiber Array Holder

In: IEEE Journal of Lightwave Technology vol. 16 pg. 1464-1472.

  • (1998)

DOI: 10.1109/50.704612

Abstract anzeigen

We have constructed an optical fiber switch, which allows to route an information carrying laser beam to nine multimode optical fibers. The fibers are accurately positioned in a polymethylmethacrylate (PMMA) fiber array holder, fabricated with deep proton lithography. To switch light from one fiber to another, we use active control of the polarization of light by means of nematic liquid crystal retarders or ferroelectric polarization rotators. The system shows insertion losses as low as 3 dB and crosstalk ratios below -30 dB. These figures are still susceptible to considerable improvements. The switching speed is on the order of 10 Hz using nematic liquid crystals and was extended to 10 kHz with ferroelectric liquid crystals. Potential applications of the fiber switch are discussed. As an illustration we have demonstrated the multiplexing of optical fiber proximity sensors. We also describe scale reduction and cascadability issues.
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Zeitschriftenartikel

  • Maria Kufner
  • S. Kufner

Micro-optics for optical interconnects

In: International Journal of Optoelectronics vol. 12 pg. 119-126.

  • (1998)
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Beitrag (Sammelband oder Tagungsband)

  • V. Baukens
  • G. Verschaffelt
  • P. Tuteleers
  • P. Vynck
  • H. Ottevaere
  • Maria Kufner
  • S. Kufner
  • I. Veretennicoff
  • R. Bockstaele
  • B. Dhoedt
  • R. Baets
  • H. Thienpont

Performance simulations of optical multi-chip-module interconnects: Comparing guided-wave and free-space pathways

pg. 412-415.

  • (1998)
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Beitrag (Sammelband oder Tagungsband)

  • H. Thienpont
  • G. Verschaffelt
  • R. Buczynski
  • P. Tuteleers
  • P. Vynck
  • V. Baukens
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • J. Genoe
  • D. Coppée
  • R. Vounckx
  • P. Heremans
  • I. Veretennicoff

Demonstration of a Monolithic Micro-Optical Bridge for Free-Space Intrachip Interconnects

In: Diffractive Optics and Micro-optics. Proceedings of the OSA Summer Topical Meeting on Diffractive Optics and Micro-Optics (OSA Technical Digest Series) pg. 108-110.

  • (1998)

Abstract anzeigen

Future advances in the application of photonic interconnects will involve the insertion of parallel-channel linksinto Multi-Chip Modules (MCMs) [1]. These will make use of new device-level components such as arrays of Vertical Cavity Surface Emitting Lasers (VCSEL's) [2] or arrays of Micro Cavity Light-Emitting Diodes(MCLED’s) [3] and low power photoreceiver circuits [4]. One of the challenges associated with the development of free-space intra- and inter-MCM optoelectronic interconnects is the fabrication of manufacturable, chip-compatible,and high precision monolithic micro-optical pathway blocks. These three-dimensional modules should integratemicro-optical components to optically interconnect surface-normal transmitters and receivers.In this paper we first report on the fabrication of such a refractive micro-optical bridge by deep protonlithography [5]. Next we use this component to demonstrate the proof-of-principle of optical intra-chipinterconnects by establishing a digital data link between optoelectronic transceivers positioned on the same chip.Finally we project future performances of this approach by extrapolating present-day results in the light of improved lens and emitter characteristics.Deep proton irradiation of Poly Methyl MethAcrylate (PMMA) is a deep etch lithographic technique that allowsthe fabrication of monolithic structures integrating refractive microlenses, microprisms, fiber positioning holes,stand-offs and alignment features [5] [6]. The technique works as follows: a proton beam in the energy rangebetween 5 and 10 MeV, passing through a metal mask, impinges on a high molecular weight PMMA substrate. Theprotons break the polymer chains and decrease the material's molecular weight. Using a specific developer theirradiated zone can then be selectively removed, making it possible to structure the sample to depths of severalhundreds of microns with an optical surface quality of better than 20 nm. To demonstrate an intra-chip opticalinterconnect between two opto-electronic transceiver elements, we have applied this deep proton lithography tofabricate a monolithic micro-optical bridge consisting of two micromirrors and two cylindrical microlenses (seeFig. 1 and Fig. 2).As opto-electronic transceiver elements we have used optical thyristors [7]. These emitter-receiver devices arefabricated as a double heterojunction PnpN structure in the GaAs/AlGaAs material system. They are bistableFigure 1 Setup for intra-chip datatranscriptionFigure 2 Photograph of the micro-optical bridge used torealize the optical pathway represented in fig. 1
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  • P. Tuteleers
  • P. Vynck
  • H. Ottevaere
  • V. Baukens
  • G. Verschaffelt
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • I. Veretennicoff
  • H. Thienpont

Advanced Fabrication Method for Monolithic Micro-optical Elements using Deep Proton Lithography and CAD-CAM

pg. 7.

  • (1998)
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Beitrag (Sammelband oder Tagungsband)

  • H. Thienpont
  • P. Vynck
  • P. Tuteleers
  • H. Ottevaere
  • V. Baukens
  • G. Verschaffelt
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • I. Veretennicoff

Technological Aspects of Deep Proton Lithography for the Fabrication of Micro-optical Elements for Optical Interconnects

In: Optical Fabrication and Testing. null (OSA Technical Digest Series) pg. 133-135.

Washington, DC, USA

  • (1998)
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Beitrag (Sammelband oder Tagungsband)

  • G. Verschaffelt
  • R. Buczynski
  • P. Tuteleers
  • P. Vynck
  • V. Baukens
  • H. Ottevaere
  • C. Debaes
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • J. Genoe
  • D. Coppée
  • R. Vounckx
  • S. Borghs
  • I. Veretennicoff
  • H. Thienpont

Experimental demonstration of a multi-channel micro-optical bridge for multi-Gb/s, free-space intra MCM interconnects

pg. 44-47.

  • (1998)

Abstract anzeigen

We demonstrate a 2.5Gb/s optical intra-MCM data link with a four-channel micro-optical bridge. Thisbridge was fabricated by deep proton lithography and monolithically integrates cylindrical lenses and micro-mirrors.
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Beitrag (Sammelband oder Tagungsband)

  • G. Verschaffelt
  • R. Buczynski
  • P. Tuteleers
  • P. Vynck
  • V. Baukens
  • H. Ottevaere
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • J. Genoe
  • D. Coppée
  • R. Vounckx
  • P. Heremans
  • H. Thienpont
  • I. Veretennicoff

Fabrication and experimental demonstration of a multi-channel module for intra-MCM optical interconnects

In: Summaries of Papers Presented at the Conference on Lasers and Electro-Optics. Conference Edition.. null (Vol. 6) pg. 351-352.

  • (1998)

DOI: 10.1109/CLEO.1998.676285

Abstract anzeigen

Summary form only given. We use deep proton irradiation of poly(methyl methacrylate) (PMMA) as a deep-etch lithographic technique that allows us to fabricate monolithic structures integrating refractive microlenses, micromirrors, fiber positioning holes, standoffs, and alignment features. The technique works as follows: a proton beam in the energy range between 5 and 10 MeV, passing through a metal mask, impinges on a high-molecular-weight PMMA substrate.
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Beitrag (Sammelband oder Tagungsband)

  • P. Tuteleers
  • P. Vynck
  • H. Ottevaere
  • V. Baukens
  • G. Verschaffelt
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • I. Veretennicoff
  • H. Thienpont

Technological Aspects of Deep Proton Lithography for the Fabrication of Micro-optical Elements for Photonics in Computing Applications

pg. 409-411.

  • (1998)
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Buch (Monographie)

  • Maria Kufner
  • S. Kufner

Micro-optics and lithography

VUBPress Brussels, Belgium

  • (1997)

Abstract anzeigen

"This book is a thorough review of current techniques for the fabrication of micro-optical elements. It gives an overview of diffractive and refractive micro-optics and includes also guided wave micro-optics. Special attention is given to new techniques including deep etch lithography, like excimer lasers, LIGA and high energy ion irradiation." "The book is of interest for all scientists in both industry and academia who are working in the field of compact micro-optical systems. This includes optical data transmission in waveguides and free-space, compact optical imaging systems and many other areas of optical engineering." "Graduate students will also find it a very useful introduction to this large and rapidly expanding field. It covers major techniques and describes methods for each, providing much 'how-to-do' information."--BOOK JACKET.
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Beitrag (Sammelband oder Tagungsband)

  • G. Verschaffelt
  • R. Buczynski
  • P. Tuteleers
  • P. Vynck
  • V. Baukens
  • Maria Kufner
  • S. Kufner
  • A. Hermanne
  • J. Genoe
  • D. Coppée
  • R. Vounckx
  • P. Heremans
  • H. Thienpont
  • I. Veretennicoff

Experimental demonstration of free space intrachip micro-optical interconnect

pg. 13-16.

Eindhoven, The Netherlands

  • (1997)
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Beitrag (Sammelband oder Tagungsband)

  • V. Baukens
  • G. Verschaffelt
  • P. Tuteleers
  • P. Vynck
  • H. Ottevaere
  • Maria Kufner
  • S. Kufner
  • H. Thienpont
  • I. Veretennicoff
  • B. Dhoedt
  • R. Baets

Optical performance analysis of free-space and guided-wave optical pathway blocks for intra-MCM interconnects

pg. 129-132.

Eindhoven, The Netherlands

  • (1997)
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Beitrag (Sammelband oder Tagungsband)

  • P. Vynck
  • P. Tuteleers
  • H. Ottevaere
  • V. Baukens
  • G. Verschaffelt
  • S. Kufner
  • Maria Kufner
  • A. Hermanne
  • H. Thienpont
  • I. Veretennicoff

Technological aspects of deep proton lithography for the fabrication of micro-optical elements

pg. 21-24.

Eindhoven, The Netherlands

  • (1997)
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Beitrag (Sammelband oder Tagungsband)

  • S. Kufner
  • Maria Kufner
  • G. Verschaffelt
  • K. Praet
  • V. Baukens
  • P. Tuteleers
  • P. Vynck
  • H. Thienpont
  • I. Veretennicoff

Intrachip interconnect with a monolithic free space optical bridge

pg. 275-278.

Enschede

  • (1996)
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner

Monolithische Integration von Mikromechanik und Mikrooptik für optische Kurzstreckenverbindungen

pg. 20-25.

  • (1996)
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Zeitschriftenartikel

  • Maria Kufner
  • S. Kufner
  • P. Chavel

Irradiation protonique en volume: un outil pour la fabrication de composants micro-optique

In: Entropie pg. 9-14.

  • (1996)
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Zeitschriftenartikel

  • S. Lazare
  • J. Lopez
  • J.-M. Turlet
  • Maria Kufner
  • S. Kufner
  • P. Chavel

Microlenses fabricated by UV excimer laser irradiation of PMMA followed by styrene diffusion

In: Applied Optics vol. 35 pg. 4471-4475.

  • (1996)

DOI: 10.1364/AO.35.004471

Abstract anzeigen

A new technique of microlens array fabrication based on the use of excimer laser radiation is described. Poly(methyl methacrylate) (PMMA) substrates are treated with many low-energy KrF laser pulses and exposed to styrene vapor. The irradiated material swells, producing spherical microlenses that are stabilized by UV polymerization. The chemistry of this process and the optical quality of the lenses are discussed.
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Beitrag (Sammelband oder Tagungsband)

  • H. Thienpont
  • A. Kirk
  • A. Goulet
  • S. Kufner
  • Maria Kufner
  • N. Nieuborg
  • M. Kuijk
  • R. Vounckx
  • P. Heremans
  • G. Borghs
  • I. Veretennicoff

Optoelectronic subsystems for information processing with PnpN optical thyristors

pg. 67-68.

  • (1996)
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner
  • S. Lazare
  • P. Pichon
  • P. Chavel

Microlenses in PMMA fabricated by particle or electromagnetic irradiation and monomer diffusion

In: Microlens Arrays. null (EOS Topical Meetings Digest Series) pg. 26-28.

  • (1995)
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner
  • P. Lalanne
  • P. Pichon
  • P. Chavel

Integration of microlens and fiber holder arrays by deep proton irradiation

In: Optical Computing. null (Conference series) pg. 235-238.

London

  • (1995)
  • TC Teisnach Sensorik
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner
  • H. Thienpont
  • P. Pichon
  • P. Chavel

High quality flat surfaces in refractive microoptics fabricated by deep proton irradiation

In: Optique et information. null (EOS Topical Meetings Digest Series) pg. 9-10.

  • (1995)
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Zeitschriftenartikel

  • Maria Kufner
  • S. Kufner

Fabrication of monolithic integrated fiber-lens connector arrays by deep proton irradiation

In: Microsystems Technology vol. 2 pg. 114-118.

  • (1995)

DOI: 10.1007/BF02739541

Abstract anzeigen

Deep proton irradiation in poly (methyl methacrylate) (PMMA) is a fabrication method for monolithic integrated micro optics which offers high stability and interesting autoalignment features. The process consists of three basic steps: irradiation of a PMMA substrate followed by either a development of the irradiated regions or a swelling of the irradiated regions by organic vapor or both applied to different regions. With this technique a variety of elementary refractive microoptical components and monolithically integrated combinations can be fabricated: microlenses, microprisms, beam splitters, fiber connectors with selfaligned microlenses on top of each fiber.
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner
  • P. Pichon
  • P. Chavel
  • M. Frank

Refractive Microprisms with Improved Surface Quality by Proton Polishing

In: Optical Computing. null (OSA Technical Digest Series) pg. 121-123.

Washington, D. C.

  • (1995)
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Zeitschriftenartikel

  • Maria Kufner
  • S. Kufner
  • P. Chavel
  • M. Frank

Monolithic integration of microlens arrays and fiber holder arrays in PMMA with fiber selfcentering

In: Optics Letters vol. 20 pg. 276-278.

  • (1995)

DOI: 10.1364/OL.20.000276

Abstract anzeigen

For many fiber applications the precise spacing from one fiber to another and the collimation of the outgoing light are important subjects. In the case of three-dimensional arrangements, such as fiber arrays, the complexity increases. The method of proton irradiation of poly(methyl methacrylate) permits the fabrication of slightly fan-shaped fiber holder arrays that can correct inhomogeneities of the fiber diameters in the micrometer range. Even a three-dimensional monolithic integration of fiber holders and corresponding microlenses can be achieved.
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Beitrag (Sammelband oder Tagungsband)

  • P. Lalanne
  • Maria Kufner
  • S. Kufner
  • P. Chavel

2D fiber connector based on refractive and diffractive optics for intracomputer communication

Washington, DC

  • (1994)
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner
  • P. Chavel
  • P. Pichon

Fiber array alignment using deep proton irradiation

pg. 166.

  • (1994)
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner
  • M. Frank

Monolithically integrated refractive optical interconnection networks”, Miniature and Micro-Optics and Micromechanics

pg. 150-158.

  • (1993)
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Zeitschriftenartikel

  • Maria Kufner
  • S. Kufner
  • M. Frank
  • J. Moisel
  • M. Testorf

Microlenses in PMMA with high relative aperture: A parameter study

In: Pure and Applied Optics: Journal of the European Optical Society Part A vol. 2 pg. 9-19.

  • (1993)

DOI: 10.1088/0963-9659/2/1/003

Abstract anzeigen

Microlenses with high relative apertures can be fabricated in polymethyl methacrylate by irradiation with a high energy proton beam and diffusion of monomer vapour into the irradiated domains. The most important process parameters are characterized and their effect on the shape of the lenses is discussed.
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Zeitschriftenartikel

  • S. Kufner
  • Maria Kufner
  • M. Frank
  • A. Müller
  • K.-H. Brenner

3D integration of refractive microoptical components by deep proton irradiation

In: Pure and Applied Optics: Journal of the European Optical Society Part A vol. 2 pg. 111-124.

  • (1993)

DOI: 10.1088/0963-9659/2/2/004

Abstract anzeigen

An integration of microoptical components to three-dimensional systems is of interest for optical information processing as well as for optical interconnections. Polymethyl methacrylate (PMMA) is a suitable substrate material, because microprisms, beamsplitters and microlenses can be integrated monolithically in the same substrate by deep proton irradiation. The microcomponents can be combined to compact microoptical imaging systems which are easy to align. The fabrication method and the imaging properties of this system are discussed.
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Beitrag (Sammelband oder Tagungsband)

  • K.-H. Brenner
  • M. Frank
  • Maria Kufner
  • S. Kufner
  • M. Testorf

Microlenses in PMMA with high relative aperture; fabricated by proton irradiation combined with monomer diffusion

In: Optical Information Technology. State-of-the-Art Report (ESPRIT Basic Research Series) pg. 57-66.

Berlin; Heidelberg

  • (1993)

DOI: 10.1007/978-3-642-78140-7_7

Abstract anzeigen

A miniaturization of refractive optical elements is interesting for various applications including 3D-integrated optical systems. In these concepts the typical functions of microlenses like image formation and collimation of light are required. In most fabrication techniques for microlenses there is a trade off between the lens size and the achievable range of focal length. A new fabrication method for microlenses with high relative apertures over a wide range of diameter sizes in polymethyl methacrylate (PMMA) by irradiation with a high energy proton beam and diffusion of monomer vapor in the irradiated domains is reported in [1].
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Hochschulschrift

  • Maria Kufner

Fabrication and characterization of micro-lenses with high numerical apertures in PMMA . Dissertation

Friedrich-Alexander-Universität Erlangen-Nürnberg

  • Januar 1993 (1993)
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Beitrag (Sammelband oder Tagungsband)

  • K.-H. Brenner
  • M. Frank
  • Maria Kufner
  • S. Kufner
  • A. Müller

Deep proton irradiation of PMMA for a 3D integration of micro-optical components

pg. 159-176.

Wiesbaden

  • (1993)

Abstract anzeigen

An integration of microoptical components to threedimensional systems is of interest for optical information processing as well as for optical interconnections. Polymethyl methacrylate (PMMA) is a suitable substrate material, because microprisms, beamsplitters and microlenses can be integrated monolithically in the same substrate by deep proton irradiation. The microcomponents can be combined to compact microoptical imaging systems which are easy to align. The fabrication method and the imaging properties of this system are discussed and applications are outlined.
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Zeitschriftenartikel

  • K.-H. Brenner
  • Maria Kufner
  • S. Kufner
  • J. Moisel
  • A. Müller
  • S. Sinzinger
  • M. Testorf
  • J. Göttert
  • J. Mohr

Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding

In: Applied Optics vol. 3232 pg. 6464-6469.

  • (1993)

DOI: 10.1364/AO.32.006464

Abstract anzeigen

Micro-optics is usually associated with planar waveguides or integrated optical circuits. In this case the propagation of light is restricted to one or two dimensions, and the three-dimensional nature of light propagation is disregarded. We present a method of fabricating three-dimensional micro-optical components by the so-called LIGA process, a lithography, electroforming, and plastic molding process in which poly(methyl methacrylate) is structured by high-energy synchrotron radiation. We demonstrate an experimental system of image formation that uses microprisms and microlenses for a three-dimensional microintegration of optical components.
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Beitrag (Sammelband oder Tagungsband)

  • Maria Kufner
  • S. Kufner

Microlenses in PMMA by deep proton irradiation - capacity of the process

In: Microlens Arrays. null (EOS Topical Meetings Digest Series) vol. Microlens Arrays Vol pg. 5-8.

  • (1993)
  • TC Teisnach Sensorik
  • Angewandte Naturwissenschaften und Wirtschaftsingenieurwesen
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Graue Literatur / Bericht / Report

  • J. Götte
  • A. El-Kholi
  • M. Frank
  • Maria Kufner
  • S. Kufner
  • J. Mohr

Untersuchungen zur tiefenlithographischen Strukturierung von PMMA . KfK-Primärbericht Nr. 41.01.03.P.02 A

Karlsruhe

  • 1992 (1992)
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Beitrag (Sammelband oder Tagungsband)

  • M. Frank
  • Maria Kufner
  • S. Kufner
  • M. Testorf

A fabrication method for microlenses with high relative apertures in PMMA

pg. 163-169.

  • (1992)
  • Angewandte Naturwissenschaften und Wirtschaftsingenieurwesen
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Beitrag (Sammelband oder Tagungsband)

  • K.-H. Brenner
  • M. Frank
  • Maria Kufner
  • S. Kufner
  • J. Moisel
  • A. Müller
  • S. Sinzinger
  • M. Testorf
  • J. Göttert
  • J. Mohr

Microoptical setup with microlenses and microprisms based on refractive optics

pg. 228-233.

  • (1992)
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Beitrag (Sammelband oder Tagungsband)

  • K.-H. Brenner
  • M. Frank
  • Maria Kufner
  • S. Kufner

A new monolithic integration method for microprisms, microbeamsplitters and microlenses in PMMA

pg. 51-54.

  • (1992)
  • TC Teisnach Sensorik
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Zeitschriftenartikel

  • M. Frank
  • Maria Kufner
  • S. Kufner
  • M. Testorf

Microlenses in polymethyl methacrylate with high relative aperture

In: Applied Optics vol. 30 pg. 2666-2667.

  • (1991)

DOI: 10.1364/AO.30.002666

Abstract anzeigen

Lens arrays with relative apertures as high as 1 can be fabricated in polymethyl methacrylate with a high-energy H+b eam and diffusion of styrene in the irradiatedd omains.
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Beitrag (Sammelband oder Tagungsband)

  • K.-H. Brenner
  • Maria Kufner
  • S. Kufner
  • S. Sinzinger
  • M. Testorf

Application of diffusion and photo- sensitizing techniques in PMMA to optical interconnects

pg. 134.

  • (1990)

DOI: 10.1117/12.22159

Abstract anzeigen

A new technique for the three dimensional integration of optical components is presented. It is based on diffusion techniques and photoinitiated polymerization. Initial experimental results demonstrate the feasibility and efficiency. DIFFUSION jQ PHOTOINITIATED POLYMERISA11ON We want to combine diffusion with photoinitiated polymerization in order to form passive elements which are necessary for three dimensional integration of optical components for microoptical systems1''2. The production of optical elements by photopolymerization consists of two main steps. First the PMMA is sensitized to ultraviolet light by diffusing a photoinitiator into the substrat. Then the exposure by UV light causes an increase in the thickness and in the refractive index. The structuring can be achieved either by local diffusion and global exposure for stabilization or by global diffusion and local exposure. In the first case metal-masks for the diffusion process are necessary whereas in the second case photo-masks can be used. OPTICAL INTERCONNECFION For realizing a flexible optical interconnection plate3''4 the necessary functions are: light collimation light deflection and beam splitting. Collimation can be achieved by microlenses. For deflection we use a miniaturized prism. For beam splitting an index grating can be used. The components are integrated within a planar PMMA plate. EXPERIMENTAL RESULTS By measuring the phase profile of diffused lenses and prisms we demonstrated that phase shifts of several wavelengths can be achieved by polymerization and diffusion techniques. The main effect results from the
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Beitrag (Sammelband oder Tagungsband)

  • D. Fey
  • Maria Kufner
  • S. Kufner
  • G. Trabold
  • M. Trabold

Design and simulation of optical architectures

pg. 219-222.

  • (1990)
  • TC Teisnach Sensorik
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Zeitschriftenartikel

  • K.-H. Brenner
  • Maria Kufner
  • S. Kufner

Highly parallel arithmetic algorithms for a digital optical processor using symbolic substitution logic

In: Applied Optics vol. 29 pg. 1610-1618.

  • (1990)

DOI: 10.1364/AO.29.001610

Abstract anzeigen

Symbolic substitution logic is a powerful tool for realizing optical arithmetic in a digital optical processor, because it is matched to the parallelism of optics and to the properties of optical switching devices. Working with such processor enables the use of very efficient parallel algorithms. We have investigated the implemention of the basic arithmetic operations: addition, subtraction, multiplication, and division.
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Zeitschriftenartikel

  • K.-H. Brenner
  • M. Frank
  • Maria Kufner
  • S. Kufner

H+-Lithography for 3-D integration of optical circuits

In: Applied Optics vol. 29 pg. 3723-3724.

  • (1990)

DOI: 10.1364/AO.29.003723

Abstract anzeigen

Optical structures in polymethylmethacrylate can be generated with a high energy H+ beam. The depth of the structures is up to 1 mm. We describe this new technique and demonstrate first results.
  • Angewandte Naturwissenschaften und Wirtschaftsingenieurwesen
  • TC Teisnach Sensorik
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Kernkompetenzen

  • Mikrosystemtechnik
  • Mikrooptik
  • optische Messtechnik
  • Optik Design